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Product Energy Range Dose Range Applications Video
VIISta 80 200eV - 80keV 2E12 - 2E16 Source/Drain, Source/Drain Extension, Gate Doping, Pre-Amorphization
VIISion 250eV - 200keV 5E11 - 5E16 Same as above
Product Energy Range Dose Range Applications Video
VIISta 810 5keV - 810keV 1E11 - 1E15 Vt, Channel, Retrograde Well, Pocket and Halo
EHPi 5keV - 780keV 1E11 - 1E16 Same as above
Product Energy Range Dose Range Applications Video
VIISta 3000 10keV - 3.75MeV 5E10 - 1E16 Retrograde Well, Triple Well, Buried Layers, Vt, Channel, Pocket and Halo
Kestrel II 10keV - 3.75MeV 5E10 - 5E16 Same as above
Product Energy Range Dose Range Applications  
VIISta 10 P2LAD <50eV - 10keV 5E10 - 2E16 Source/Drain Extension, Trench, Sidewall Doping, Gate Material Modification
Product        
End Station      
VCS      


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